A key tool for process control
With our proprietary RS100, developed in-house, we offer an advanced plasma regulation solution designed to meet the highest industrial standards, while remaining optimized for seamless production integration.
By minimizing plasma fluctuations, the RS100 ensures uniform and reproducible deposition, improving adhesion, coating quality, and overall process stability.
Easy to integrate into production lines, it allows for precise control over critical PVD deposition parameters, offering optimized technology without unnecessary complexity.
RS100 plasma regulator specifications
Electrical specifications
Mass flow controller :
Fiber optic input (SMA connector)
DB9 connector for remote process start
Fiber optic input (SMA connector)
DB9 connector for remote process start
Optical specifications
Six analyzable wavelength ranges :
430 – 470nm, 480 – 520nm, 530 – 570 nm, 550 – 590nm, 580 – 620nm, 630 – 670nm.
430 – 470nm, 480 – 520nm, 530 – 570 nm, 550 – 590nm, 580 – 620nm, 630 – 670nm.
Control modes
4 control modes :
Manual control, setpoint control, ramp control, and recipe-based control (up to 5 steps)
Adjustable PID gains, sensor integration time, and min/max limits for mass flow control
Manual control, setpoint control, ramp control, and recipe-based control (up to 5 steps)
Adjustable PID gains, sensor integration time, and min/max limits for mass flow control
