Process
Want to estimate flux of reactive gaz in reactive magnetron deposition process ?
Want to estimate the angular distribution of evaporated species condensing on the substrate ?
Want to combine SIMTRA and NASCAM softwares for a complete virtual coater for magnetron deposition ?
These plugins are here to help the user to setup their simulations.
REACTIVE GAZ: Computes the ratio of metallic and reactive species flowing towards a substrate in reactive magnetron sputtering.
THERMAL EVAPORATION: Defines a thermal evaporation source (punctual or rectangular) and computes the emission probability of evaporated material that will condense on the substrate
REACTIVE GAZ: Computes the ratio of metallic and reactive species flowing towards a substrate in reactive magnetron sputtering.
THERMAL EVAPORATION: Defines a thermal evaporation source (punctual or rectangular) and computes the emission probability of evaporated material that will condense on the substrate
SIMTRA to NASCAM:
Converts Simtra output data to energy and angular distributions of species flowing towards a substrate in magnetron sputtering (see https://www.ugent.be/we/solidstatesciences/draft/en/services/software)
