Process


Want to estimate flux of reactive gaz in reactive magnetron deposition process ?

Want to estimate the angular distribution of evaporated species condensing on the substrate ?

Want to combine SIMTRA and NASCAM softwares for a complete virtual coater for magnetron deposition ?

 


These plugins are here to help the user to setup their simulations.

REACTIVE GAZ:  Computes the ratio of metallic and reactive species flowing towards a substrate in reactive magnetron sputtering.  
THERMAL EVAPORATION: Defines a thermal evaporation source (punctual or rectangular) and computes the  emission probability of evaporated material that will condense on the substrate
SIMTRA to NASCAM:  Converts Simtra output data to energy and angular distributions of species flowing towards a substrate in magnetron sputtering (see https://www.ugent.be/we/solidstatesciences/draft/en/services/software)