Process Tools
Want to estimate flux of reactive gaz in reactive magnetron deposition process ?
Want to estimate the angular distribution of sputtered species condensing on the substrate ?
Want to combine SIMTRA and NASCAM softwares for a complete virtual coater for magnetron deposition ?
Simtra to Nascam: Converts Simtra output data to energy and angular distributions of species flowing towards a substrate in magnetron sputtering (see https://www.ugent.be/we/solidstatesciences/draft/en/services/software)
Simulate Magnetron:
Calculate energy and angular distributions of depositing atoms for a circular or rectangular magnetron. The pressure range validity is: [3 mTorr – 30 mTorr]. Reactive Deposition: Compute the ratio of the metallic and reactive species flowing towards a substrate in magnetron deposition.
These plugins are here to help the user to setup their simulations.
